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AC/DC power supply / linear / high-frequency / plasma - 1 - 3 kW, 13 560 kHz | TruPlasma RF 1000, 3000 series
The TruPlasma RF 1000 series was manufactured by Trumpf and uses the power coupling technology CombineLine and an optimized power converter for maximum productivity. It is constructed to focus on RF plasma processes in semiconductor manufacturing. It also has a class energy efficiency factor of >80%. The unit has stable processes due to true 50 ohm output impedance, and an accurate control at low power levels. It has an easy and cost-efficient integration in film deposition tools. It can work with a maximum system uptime, even in critical processes.